PULSE POWER SUPPLY UNIT AND PULSE POWER SUPPLY DEVICE

摘要

To provide a pulse power supply that can obtain large power while avoiding upsizing.SOLUTION: A pulse power supply unit 10 according to the present invention includes a plurality of semiconductor switching elements 3 that are connected in parallel, the withstand voltage of the semiconductor switching elements 3 is 1 kV or higher, and the maximum output current of the semiconductor switching elements 3 is 100 A or greater. Alternatively, the pulse power supply unit 10 according to the present invention includes the semiconductor switching elements 3 which are each constituted of a semiconductor material selected from among gallium oxides, diamonds, aluminum nitrides, and aluminum gallium oxides, and the withstand voltage of the semiconductor switching element 3 is 1 kV or higher.SELECTED DRAWING: Figure 2