首页> 外国专利> Synthesis of thick single crystal diamond materials by chemical vapor deposition.

Synthesis of thick single crystal diamond materials by chemical vapor deposition.

机译:通过化学气相沉积合成厚的单晶金刚石材料。

摘要

A method for producing a plurality of single crystal CVD diamonds. The method includes attaching a plurality of single crystal diamond substrates to a first carrier substrate. The plurality of single crystal diamond substrates are subjected to a first CVD diamond growth process to form a plurality of single crystal CVD diamond on the plurality of single crystal diamond substrates. The plurality of single-crystal CVD diamonds are mounted on a carrier substrate for forming a concave portion and subjected to a second CVD diamond growth process. [Selection diagram] Fig. 1
机译:一种用于生产多个单晶CVD金刚石的方法。该方法包括将多个单晶金刚石基板附接到第一载体基板。对多个单晶金刚石衬底进行第一CVD金刚石生长工艺,以在多个单晶金刚石衬底上形成多个单晶CVD金刚石。将多个单晶CVD金刚石安装在用于形成凹部的载体基板上,并进行第二CVD金刚石生长工艺。 [选择图]图1

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号