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Synthesis of thick single crystal diamond materials by chemical vapor deposition.
Synthesis of thick single crystal diamond materials by chemical vapor deposition.
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机译:通过化学气相沉积合成厚的单晶金刚石材料。
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摘要
A method for producing a plurality of single crystal CVD diamonds. The method includes attaching a plurality of single crystal diamond substrates to a first carrier substrate. The plurality of single crystal diamond substrates are subjected to a first CVD diamond growth process to form a plurality of single crystal CVD diamond on the plurality of single crystal diamond substrates. The plurality of single-crystal CVD diamonds are mounted on a carrier substrate for forming a concave portion and subjected to a second CVD diamond growth process. [Selection diagram] Fig. 1
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