LOW TEMPERATURE FLUID PRESSURE FEEDING UNIT, LOW TEMPERATURE FLUID PRESSURE FEEDING METHOD, AND APPARATUS USING LOW TEMPERATURE FLUID PRESSURE FEEDING UNIT

摘要

PROBLEM TO BE SOLVED: To provide a low temperature fluid pressure feeding unit, a low temperature fluid pressure feeding method, and an apparatus using the low temperature fluid pressure feeding unit that do not need a heater or a cooler that is conventionally needed by recovering and using cold of low temperature fluid before being sucked into a vacuum pump and heat of the low temperature fluid after being discharged from the vacuum pump.;SOLUTION: A low temperature fluid pressure feeding unit 1 for pressure feeding low temperature fluid includes: a low temperature fluid supply passage 11 for supplying low temperature fluid; a heat exchanger 12 provided to the low temperature fluid supply passage 11 for heating the low temperature fluid; a pressure feeding unit 13 provided on the downstream side of the heat exchanger 12 in the low temperature fluid supply passage 11 for pressure feeding the low temperature fluid heated by the heat exchanger 12; and a delivery passage 14 for delivering the low temperature fluid pressure fed from the pressure feeding unit 13 through the heat exchanger 12. Heating of the low temperature fluid in the heat exchanger 12 is carried out so that the pressure feeding unit 13 reaches a temperature region in which the pressure feeding unit can suck the low temperature fluid by the heat exchange with the heated low temperature fluid flowing through the delivery passage 14.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2020,JPO&INPIT