VAPORIZATION SEPARATION METHOD AND VAPORIZATION SEPARATION DEVICE OF MIXED LIQUID, AND RECOVERY DEVICE OF VAPORIZED AND SEPARATED LIQUID

摘要

To provide a vaporization separation method and a vaporization separation device of a mixed liquid made by mixing two liquids having different vapor pressures of a low vapor pressure liquid and a high vapor pressure liquid, and recovery device of vaporized and separated liquid capable of separating and recovering each of the two liquids so as to permit simple and high-performance reutilization without occurrence of bumping while causing the mixed liquids to flow through an inclined flow channel when vaporizing and separating only the high-vapor pressure liquid from the mixed liquid.SOLUTION: A method of vaporization and separation method of cleaning liquid alone from a mixed liquid M made by mixing two liquids having different vapor pressures of quenching oil D and the cleaning liquid C includes a step of starting to flow mixed liquid by gravity toward a terminal 14b from a starting end 14a of an inclined channel 14 of a vaporizer inner part at an initial step of maintaining an inner pressure of the vaporizer 13 to which the mixed liquid is introduced at a first pressure higher than the vapor pressure of the cleaning liquid and a step of, when the mixed liquid arrives at the terminal of the inclined channel, reducing the inner pressure of the vaporizer to a second pressure lower than the vapor pressure of the cleaning liquid and higher than the vapor pressure of quenching oil from the first pressure and then maintaining the pressure.SELECTED DRAWING: Figure 2