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Piezoelectric drive, robots, and methods of driving piezoelectric drives
Piezoelectric drive, robots, and methods of driving piezoelectric drives
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机译:压电驱动器,机器人和驱动压电驱动器的方法
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摘要
A piezoelectric drive device includes: a vibrating body having a first surface and a second surface provided with a recessed portion; and a piezoelectric element provided on the first surface. The recessed portion and the piezoelectric element have an overlap region when viewed in a normal direction of the second surface.
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