MEASUREMENT METHOD OF DIFFRACTED X-RAY INTENSITY BY ONE-DIMENSIONAL OR TWO-DIMENSIONAL DETECTOR

摘要

To provide a measurement method for reducing a variation in sensitivity between detector elements in a one-dimensional/two-dimensional detector in X-ray diffraction measurement.SOLUTION: A measurement method of diffracted X-ray intensity in the present invention includes: an acquisition step of diffraction data by scanning a detector arm from a start angle to an end angle by a fixed step width by letting W be the central angle of a one-dimensional or two-dimensional detector whose chord is the length in the direction perpendicular to the diffracted X-ray, and N be the number of elements contained in the detector; a step of further acquiring diffraction data, after an increasing step of the start angle by n×W/N ( where n is a natural number satisfying 1≤n≤N ), by scanning the detector arm from the increased start angle to the end angle by the fixed step width; a step of repeating the increasing step and the further acquiring step; a step of performing 2θ angle conversion and correction of the diffraction data and sorting by 2θ: and a step of averaging the diffraction data for each W/N 2θ interval.SELECTED DRAWING: Figure 2