Optical waveguide structure, integrated optical device, and method of manufacturing optical waveguide structure

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide structure that has less losses on connections of different waveguide structures and high manufacturing tolerance.SOLUTION: There is provided an optical waveguide structure 100 characterized in that: a waveguide width W41 of a high-mesa waveguide structure 41 in a fourth optical waveguide part 40 at a connection end with an embedded waveguide structure 31 of a third optical waveguide part 30 is larger than a waveguide width W31 of the embedded waveguide structure 31; a waveguide width W42 of the high-mesa waveguide structure 41 at a connection end with at least one high-mesa waveguide structures 21, 22 of a second optical waveguide part 20 is larger than the total of waveguide widths W21, W22 of the at least one high-mesa waveguide structures 21, 22 of the second optical waveguide part 20; the embedded waveguide structure 31 has the same structure as an embedded waveguide structure 11; and a width W32 of a mesa stripe structure 32 of the third optical waveguide part 30 is equal to a waveguide width W41 of the high-mesa waveguide structure 41 at a connection end with the embedded waveguide structure 31.SELECTED DRAWING: Figure 1