Spectroscopic monitoring using neural networks

摘要

A method of processing a substrate includes performing a process of modifying a thickness of an outer layer of the substrate on the substrate, measuring a spectrum of light reflected from the substrate during the process, and generating a plurality of component values. In addition, reducing the number of dimensions of the measured spectrum, generating a characteristic value using an artificial neural network, and, based on the characteristic value, determining whether to stop processing the substrate and adjusting processing parameters. Determining one. The artificial neural network has a plurality of input nodes for receiving a plurality of component values, one output node for outputting a characteristic value, and a plurality of hidden nodes connecting the input nodes and the output nodes. [Selection diagram] FIG.