Light beam homogenization for spectral feature measurement

摘要

Measurement systems are used to measure the spectral characteristics of the pulsed light beam. The metrology system is a beam homogenizer in the path of the pulsed light beam, the beam homogenizer having an array of wavefront modifying cells, each cell having a surface area matching at least one of the spatial modes of the light beam. A beam homogenizer, and an optical frequency separator in the path of the pulsed light beam exiting the beam homogenizer, which interacts with the pulsed light beam and outputs a number of spatial components corresponding to the spectral components of the pulsed light beam. And an at least one sensor for receiving and detecting the output spatial component. [Selection diagram] Fig. 2