Surface inspection equipment, surface inspection methods, surface inspection programs and recording media

摘要

PROBLEM TO BE SOLVED: To provide a surface inspection device suitable for the inspection of an object to be inspected and capable of performing a uniform irradiation not generating a dark spot part that tends to occur in the center and the like.SOLUTION: A surface inspection device 101 includes: a hollow spreading part 1 having an opening part capable of containing an object 7 to be inspected; a first illumination part (first light source 2) for radiating light toward the spreading part 1 from the outside of the spreading part 1; a beam splitter 3 provided at an angle sloped to an optical axis of light scattered to an opening direction of the opening part from the object 7 to be inspected; a diffuser plate 4 provided in a direction reflected by the beam splitter 3 in which the light scattered to the direction of the opening from the object to be inspected is reflected by the beam splitter 3; and imaging part 5 for detecting the light which is scattered in the opening direction from the object 7 to be inspected and detecting the light transmitting the beam splitter 3.SELECTED DRAWING: Figure 1