AIRFLOW CONTROL SYSTEM AND AIRFLOW CONTROL METHOD OF HIGH AIRTIGHT FACILITY

摘要

To prevent hazards substances or contaminants such as dust and dirt from flowing or moving out of a chamber of a non-clean side to the chamber of a clean side due to the opening/closing operation or behavior of a door and the behavior or movement of an employee in the entry and exit.SOLUTION: A normally-closed airtight door (5) is installed in a passage opening between a non-clean chamber (C) and a clean chamber (E) for constituting a high airtight facility (B). The air pressure of the clean chamber is set to a value higher than the air pressure of the non-clean chamber. An airflow control system of the high airtight facility has an air supply device (10) for downwardly blowing the non-contaminated air or clean air from a ceiling portion of the non-clean chamber in the vicinity of the door. The air supply device forms a descending air flow (30) of the non-contaminated air or the clean air in a space portion (η) of the non-clean chamber being adjacent to the door and generally covering a door frame. The descending air flow prevents the air of the non-clean chamber from flowing or moving in the clean chamber through the door opening when the door is opened.SELECTED DRAWING: Figure 3