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BAW resonator with reduced self-heating, high-frequency filter with resonator, duplexer with high-frequency filter, and method of manufacturing the same
BAW resonator with reduced self-heating, high-frequency filter with resonator, duplexer with high-frequency filter, and method of manufacturing the same
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机译:具有减少的自发热的baw谐振器,具有谐振器的高频滤波器,具有高频滤波器的双工器及其制造方法
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摘要
The invention relates to a BAW resonator with reduced heat build-up. The heat build-up is reduced by a thermal bridge, which dissipates heat from the electro-acoustically active region to a support substrate, without impairing the acoustics of the resonator.
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