Gas flow controller, gas flow meter and gas flow sensor

摘要

PROBLEM TO BE SOLVED: To provide a gas flow rate control device attaining the miniaturization of a device and the reduction in the manufacturing cost and applicable for a gas flow rate control of a large flow rate from a minute flow rate.SOLUTION: A gas flow rate control device includes a configuration such that gas flow rate adjustment means for adjusting a mass flow rate of a gas that flows a gas flow passage is composed of a gas flow rate control valve 2 having a direct operated stepping motor 16 as an actuator for making a valve body open/close a valve body, and gas flow rate measurement means for measuring the mass flow rate of the gas that flows the gas flow passage is composed of a gas flow rate meter 3 having a heat type MEMS flow sensor chip 35 for detecting a flow of the gas. The gas flow rate control valve 2 and the gas flow rate meter 3 are device units integrated with or separated from each other, and both these device units comprise an integrally connectable structure by a fixing base 5.SELECTED DRAWING: Figure 3