Optical element evaluation value calculation method, evaluation value calculation program, and evaluation value calculation device

摘要

This evaluation value calculation method for an optical element includes: a step for acquiring shape errors, for an inspected surface of the optical element, indicating deviation from a design value; a step for extracting, for positions i on the optical element, components of weighting functions for values, among the acquired shape errors, included within a range which is set with each of the positions i as the center and is twice as large as a radius u smaller than an effective radius; and a step for calculating an evaluation value on the basis of the component of the weighing function at each of the extracted positions i.