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Data processing method, data processing program, charged particle beam drawing method, and charged particle beam drawing apparatus
Data processing method, data processing program, charged particle beam drawing method, and charged particle beam drawing apparatus
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机译:数据处理方法,数据处理程序,带电粒子束描绘方法以及带电粒子束描绘装置
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摘要
In one embodiment, a data processing method is for creating write data from design data, and registering the write data into a writing apparatus. The method includes applying, to a plurality of pieces of first frame data into which first chip data of the design data is divided, a plurality of conversion processes to create the write data, and applying a plurality of pre-processes to a plurality of pieces of second frame data into which second chip data of the write data is divided, and registering the second chip data into the writing apparatus. The plurality of conversion processes and the plurality of pre-processes are each performed in a pipeline processing on a per-frame basis. The write data is registered into the writing apparatus on a per-chip basis, on a per-virtual chip basis, or on a per-frame basis. The virtual chip includes a plurality of chips combined together.
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