Observation method of fault structure, observation device, and computer program

摘要

PROBLEM TO BE SOLVED: To observe a tomographic structure having a light absorption layer by an optical coherence tomography.SOLUTION: A tomographic layer structure to be observed is observed by an optical coherence tomography. A tomographic structure which is an observation object 30 includes a light absorption layer made from a light absorption material that absorbs light having at least a portion of wavelength of the light source spectrum. The tomographic layer structure is irradiated with measurement light from a light source. A reflection light profile of the tomographic layer structure is generated based on interference light between reflection light reflected from the tomographic layer structure by the measurement light and reference light. A comparison is made between the reflection light profile and a plurality of light propagation simulation results in a plurality of simulated tomographic layer structures each having a simulated light absorption layer with a different layer thickness. A layer thickness of a simulated light absorption layer which becomes an object of the simulation for obtaining the light propagation simulation result matching the reflection light profile at the maximum is determined as the layer thickness of the light absorption layer owned by the tomographic layer structure which is the observation object 30.SELECTED DRAWING: Figure 3