Cryopump, cryopump occluded gas amount estimation device, and cryopump occluded gas amount estimation method

摘要

A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuum vessel, based on a vacuum measurement signal representing the degree of vacuum in the cryopump vacuum vessel; and a cryopumped gas amount quantification unit which includes a cryopumped gas amount quantification relation correlating the ultimate pressure with a cryopumped gas amount estimated value and converts the ultimate pressure into the cryopumped gas amount estimated value.