The device (50) includes an outlet (51) for spraying the liquid, a liquid supply device (52) for supplying the liquid to the outlet, a cylindrical inner cover (53) defining the outlet, and an inner cover. An outer cover portion (54) disposed outside the portion, a suction port (55) defined by the inner cover portion and the outer cover portion, and a gas suction device (56) for sucking gas through the suction port. And The length of the outlet in the first direction is greater than the length of the outlet in the second direction orthogonal to the first direction, and the outlet is configured to spray the liquid toward the outer peripheral surface (100 s) of the base material. The first direction is directed to the outer peripheral surface so as to be substantially parallel to the axial direction of the substrate. The gas suction device is configured to suck a gas having a larger flow rate than the flow rate of the gas containing the liquid sprayed from the outlet.
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