首页> 外国专利> Read out integrated circuit (ROIC) for rapid testing and characterization of conductivity skew of phase-change material (PCM) in PCM radio frequency (RF) switches

Read out integrated circuit (ROIC) for rapid testing and characterization of conductivity skew of phase-change material (PCM) in PCM radio frequency (RF) switches

机译:读出集成电路(ROIC),以快速测试和表征PCM射频(RF)开关中相变材料(PCM)的电导率偏斜

摘要

A rapid testing read out integrated circuit (ROIC) includes phase-change material (PCM) radio frequency (RF) switches residing on an application specific integrated circuit (ASIC). Each PCM RF switch includes a PCM and a heating element transverse to the PCM. The ASIC is configured to provide amorphizing and crystallizing electrical pulses to a selected PCM RF switch. The ASIC is also configured to generate data for determining and characterizing OFF state conductivity skew and ON state conductivity skew of the PCM in the selected PCM RF switch after the ASIC performs a plurality of OFF/ON cycles. In one implementation, a testing method using the ASIC is disclosed.
机译:快速测试读出集成电路(ROIC)包括驻留在专用集成电路(ASIC)上的相变材料(PCM)射频(RF)开关。每个PCM RF开关都包括一个PCM和一个垂直于PCM的加热元件。 ASIC配置为向选定的PCM RF开关提供非晶化和结晶化的电脉冲。 ASIC还被配置为在ASIC执行多个OFF / ON周期后,生成用于确定和表征所选PCM RF开关中PCM的OFF状态电导偏斜和ON状态电导偏斜的数据。在一个实施方式中,公开了一种使用ASIC的测试方法。

著录项

  • 公开/公告号US10739290B2

    专利类型

  • 公开/公告日2020-08-11

    原文格式PDF

  • 申请/专利权人 NEWPORT FAB LLC;

    申请/专利号US201916544724

  • 申请日2019-08-19

  • 分类号H01L45;G01N27/04;H01L27/24;

  • 国家 US

  • 入库时间 2022-08-21 11:31:39

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