Phase-change material (PCM) contact configurations for improving performance in PCM RF switches

摘要

A radio frequency (RF) switch includes a phase-change material (PCM) and a heating element underlying an active segment of the PCM, the PCM and heating element being situated over a substrate. A contact dielectric is over the PCM. PCM contacts have upper portions and uniform plate slot lower portions. The uniform plate slot lower portions have a total plate resistance R_PLATE, and a total plate slot interface resistance R_PLATE-INT. The upper portions have a total capacitance C_UPPER to the uniform plate slot lower portions, and the PCM has a total capacitance C_PCM to the substrate. The uniform plate slot lower portions significantly reduce a product of (R_PLATE+R_PLATE-INT) and (C_UPPER+C_PCM). As an alternative to the uniform plate slot lower portions, PCM contacts have segmented lower portions. The segmented lower portions significantly reduce C_UPPER.