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Innovative source assembly for ion beam production
Innovative source assembly for ion beam production
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机译:用于离子束生产的创新离子源组件
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摘要
A source assembly for ion beam production is disclosed herein. An example source assembly may include a pair of plates separated by a distance, with each plate having an aperture, and the respective apertures aligned, and an ionization space defined at least by the distance and the respective apertures, where a ratio of the distance to an ionic mean free path of a gas in the ionization space is greater than one.
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