首页>
外国专利>
Nitrogen oxide based gas sensor, oxygen pump, gas sensor apparatus, manufacturing method of gas sensor apparatus, and sensor network system
Nitrogen oxide based gas sensor, oxygen pump, gas sensor apparatus, manufacturing method of gas sensor apparatus, and sensor network system
展开▼
机译:基于氮氧化物的气体传感器,氧气泵,气体传感器设备,气体传感器设备的制造方法以及传感器网络系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
A nitrogen oxide based gas sensor includes: a substrate provided with a beam structure having a MEMS structure; a heater disposed on the substrate; a lower electrode disposed on the heater, a solid electrolyte layer disposed on the lower electrode; an upper electrode disposed on a surface of the solid electrolyte layer facing the lower electrode and configured to introduce a measurement target gas; a cavity portion formed in the substrate; and a gas flow path disposed so as to connect the cavity portion and the lower electrode, wherein the gas sensor is configured to detect a concentration of nitrogen oxide in the measurement target gas.
展开▼