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Determination of operability of a digital scanner with shearing interferometry
Determination of operability of a digital scanner with shearing interferometry
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机译:用剪切干涉法确定数字扫描仪的可操作性
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摘要
System and method for monitoring of performance of a mirror array of a digital scanner with a use of a lateral shearing interferometer (operated in either static or a phase-shifting condition) to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the mirror's deformation.
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