M(n+1)Xn, [Formula 1];wherein, in Formula 1, M is at least one transition metal selected from early transition metal elements, X is at least one selected from C and N, and n is an integer selected from 1 to 3."/>
公开/公告号US10753804B2
专利类型
公开/公告日2020-08-25
原文格式PDF
申请/专利号US201916292328
申请日2019-03-05
分类号G01J5/02;G01J5/12;G01J5/34;H01L35/26;
国家 US
入库时间 2022-08-21 11:30:35