Incorporating change diagnosis using probabilistic tensor regression model for improving processing of materials

摘要

A probability distribution of a manufacturing system's performance conditioned on a training dataset comprising a historical tensor and associated performance metric of a reference period is learned. An input tensor associated with a time window and the input tensor's associated performance metric may be received. The input tensor includes at least multiple sensor variables associated with the manufacturing system and multiple steps of the manufacturing system's manufacturing process. Based on the probability distribution, an overall change is determined between the training dataset's relationship of the historical tensor and associated performance metric, and the relationship of the input tensor and the input tensor's associated performance metric. Based on the probability distribution, contribution of at least one of the multiple variables and the multiple steps to the overall change is determined. An action is automatically triggered in the manufacturing system which reduces the overall change.