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Testing method for testing wafer level chip scale packages

机译:用于测试晶片级芯片级封装的测试方法

摘要

A testing method for testing wafer level chip scale packages formed on a wafer including a wafer substrate and spaced-apart contact electrodes disposed on the wafer substrate, includes: providing a test device including a probe card formed with a plurality of parallel probe holes having a uniform cross-sectional dimension, and a plurality of probes respectively received in the probe holes and extending respectively in the probe holes along axes of the probe holes; and electrically connecting the contact electrodes to the probes. A distance between the axes of two adjacent ones of the probe holes is equal to a smallest spacing between two adjacent ones of the contact electrodes and is not greater than 0.5 mm.
机译:一种用于测试形成在包括晶片基板和设置在晶片基板上的间隔开的接触电极的晶片上的晶片级芯片规模封装的测试方法,包括:提供一种测试装置,该测试装置包括形成有多个平行探针孔的探针卡,所述探针卡具有多个平行的探针孔。横截面尺寸均匀,并且多个探针分别容纳在探针孔中并沿着探针孔的轴线分别在探针孔中延伸。并将接触电极电连接到探针。两个相邻的探针孔的轴线之间的距离等于两个相邻的接触电极之间的最小间距,并且不大于0.5mm。

著录项

  • 公开/公告号US10566256B2

    专利类型

  • 公开/公告日2020-02-18

    原文格式PDF

  • 申请/专利权人 WINWAY TECHNOLOGY CO. LTD.;

    申请/专利号US201815862218

  • 申请日2018-01-04

  • 分类号G01R1/06;H01L21/66;H01L21/683;H01L23;G01R31/28;G01R1/073;G01R1/067;

  • 国家 US

  • 入库时间 2022-08-21 11:29:42

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