Electron microscope for magnetic field measurement and magnetic field measurement method

摘要

An electron microscope that measures electromagnetic field information separates an electric field distribution and a magnetic field distribution of a specimen with high precision to measure the electromagnetic field information. The electron microscope is configured with an electron source 1, an electron gun deflection coil 3, converging lenses 4a and 4b, an irradiation system astigmatic compensation coil 5, irradiation system deflection coils 6a and 6b, a magnetic field application coil 8, an objective lens 11, an imaging system astigmatic compensation coil 12, imaging system deflection coils 13a and 13b, a magnifying lens 17, an electron detector 18, a control analysis apparatus 20, and the like, and the control analysis apparatus 20 repeats a plurality of times measurement of first electromagnetic field information with an output signal from the electron detector by exercising first electron beam control after a first magnetic field is applied to the specimen 10 and then measurement of second electromagnetic field information similarly by exercising second electron beam control after a second magnetic field is applied to the specimen, and separates and measures an electric field distribution and a magnetic field distribution with high precision from the obtained first and second electromagnetic field information.