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Transforming a Valve Metal Layer Into a Template Comprising a Plurality of Spaced (Nano)channels and Forming Spaced Structures Therein
Transforming a Valve Metal Layer Into a Template Comprising a Plurality of Spaced (Nano)channels and Forming Spaced Structures Therein
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机译:将阀金属层转换为包含多个间隔(纳米)通道的模板并在其中形成间隔结构
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摘要
At least one embodiment relates to a method for transforming at least part of a valve metal layer into a template that includes a plurality of spaced channels aligned longitudinally along a first direction. The method includes a first anodization step that includes anodizing the valve metal layer in a thickness direction to form a porous layer that includes a plurality of channels. Each channel has channel walls and a channel bottom. The channel bottom is coated with a first insulating metal oxide barrier layer as a result of the first anodization step. The method also includes a protective treatment. Further, the method includes a second anodization step after the protective treatment. The second anodization step substantially removes the first insulating metal oxide barrier layer, induces anodization, and creates a second insulating metal oxide barrier layer. In addition, the method includes an etching step.
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