Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head

摘要

An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba_1-xCa_xTi_1-yZr_yO₃ (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.