首页> 外国专利> Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting abnormality

Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting abnormality

机译:能够检测异常的位置检测设备,镜头设备,图像拾取系统,机床设备,位置检测方法和非暂时性计算机可读存储介质

摘要

A position detection apparatus (100) which detects a position of an object includes a scale (2) including a periodic pattern, a detector (7) configured to be movable relative to the scale, and a signal processor (101) configured to acquire position information of the object based on a first output signal from the detector and perform abnormality determination based on a second output signal from the detector, a spatial frequency response of the first output signal is peaked at a first spatial frequency, and a spatial frequency response of the second output signal is peaked at a second spatial frequency different from the first spatial frequency.
机译:用于检测物体的位置的位置检测装置( 100 )包括具有周期性图案的刻度尺( 2 ),检测器( 7 信号处理器( 101 )被配置为可相对于标尺移动,信号处理器被配置为基于来自检测器的第一输出信号获取物体的位置信息,并基于第二输出进行异常确定来自检测器的信号,第一输出信号的空间频率响应在第一空间频率处达到峰值,第二输出信号的空间频率响应在与第一空间频率不同的第二空间频率处达到峰值。

著录项

  • 公开/公告号US10540559B2

    专利类型

  • 公开/公告日2020-01-21

    原文格式PDF

  • 申请/专利权人 CANON KABUSHIKI KAISHA;

    申请/专利号US201514970715

  • 发明设计人 CHIHIRO NAGURA;

    申请日2015-12-16

  • 分类号G06T7/70;G06T7;G06K9/03;G01D5/347;G06K9/20;G06T7/20;G01D5/244;

  • 国家 US

  • 入库时间 2022-08-21 11:27:30

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