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Roll-to-roll patterning of transparent and metallic layers

机译:透明金属层的卷对卷图案

摘要

Systems and methods are disclosed by which patterns of various materials can be formed on flexible substrates by a continuous roll-to-roll manufacturing process. The patterns may include metallic, transparent conductive, or non-metallic elements with lateral dimensions including in the range from below 100 nanometers to millimeters and with thickness dimensions including the range from tens of Angstroms to greater than 10,000 Angstroms. The substrate may be any material capable of sufficient flexibility for compatibility with roll-based processing equipment, including polymeric films, metallic foils, and thin glass, with polymeric films representing a particularly broad field of application. Methods may include the continuous roll-to-roll formation of a temporary polymeric structure with selected areas open to the underlying substrate, the continuous addition or subtraction of constituent materials, and the continuous removal, where necessary, of the polymeric structure and any excess material.
机译:公开了系统和方法,通过该系统和方法,可以通过连续的卷对卷制造工艺在柔性基板上形成各种材料的图案。图案可以包括金属,透明导电或非金属元件,其横向尺寸包括在从小于100纳米到毫米的范围内,并且厚度尺寸在从几十埃到大于10,000埃的范围内。基底可以是能够具有足够的柔韧性以与基于辊的加工设备兼容的任何材料,包括聚合物膜,金属箔和薄玻璃,其中聚合物膜代表特别广泛的应用领域。方法可包括连续滚动形成临时聚合物结构,选定区域向下面的基材开放,连续添加或减去组成材料,以及在必要时连续去除聚合物结构和任何多余材料。

著录项

  • 公开/公告号US10546722B2

    专利类型

  • 公开/公告日2020-01-28

    原文格式PDF

  • 申请/专利权人 MICROCONTINUUM INC.;

    申请/专利号US201615090265

  • 发明设计人 W. DENNIS SLAFER;

    申请日2016-04-04

  • 分类号H01J37/32;H05K1/03;H05K3/06;G03F7/20;H05K3/14;H05K3;H05K1/09;C23C18/16;H01L51;H05K3/10;B82Y10;B82Y40;G03F7;C25D1;C25D5/02;B29C35/08;B05D1/28;B05D1/32;B05D1/40;H01L51/52;

  • 国家 US

  • 入库时间 2022-08-21 11:26:11

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