ARRANGEMENT FOR DECONTAMINATION OF A SURFACE OF OBJECTS AND METHOD FOR DECONTAMINATION OF A SURFACE OF OBJECTS

摘要

An arrangement and a method are disclosed for the decontamination of surfaces (2S) of objects (2) with reactive species (21). A plasma generator (1), in which active species (21) are generated, is provided in a contact chamber (10). The active species (21) are delivered to the contact chamber (10) via a dispenser valve (14) of the plasma generator (1). The delivery takes place at a predefined dew point temperature, so that a uniform condensate film (13) is deposited on the surface (2S) of the object (2).