SiC SINTERED BODY, HEATER AND METHOD FOR PRODUCING SiC SINTERED BODY

摘要

Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio R_max/R_ave of a maximum volume resistivity R_max of the sintered body to an average volume resistivity R_ave of the sintered body is 1.5 or lower; a ratio R_min/R_ave of a minimum volume resistivity R_min of the sintered body to the average volume resistivity R_ave is 0.7 or higher; and a relative density of the sintered body is 98% or higher.