首页> 外国专利> IMAGE RECONSTRUCTION METHOD FOR X-RAY MEASURING DEVICE, STRUCTURE MANUFACTURING METHOD, IMAGE RECONSTRUCTION PROGRAM FOR X-RAY MEASURING DEVICE, AND X-RAY MEASURING DEVICE

IMAGE RECONSTRUCTION METHOD FOR X-RAY MEASURING DEVICE, STRUCTURE MANUFACTURING METHOD, IMAGE RECONSTRUCTION PROGRAM FOR X-RAY MEASURING DEVICE, AND X-RAY MEASURING DEVICE

机译:用于x射线测量设备的图像重建方法,结构制造方法,用于x射线测量设备的图像重建程序以及x射线测量设备

摘要

An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object; and generating an image using the differential data and the estimated structure.
机译:一种图像重建方法,包括:产生差分数据,该差分数据指示通过将X射线照射到测量对象而检测通过检测穿过测量对象的X射线而生成的检测数据之间的差异,以及估计通过估计假定为X射线而生成的数据之间的差异。已经通过通过估计测量对象的形状而生成的估计结构;并使用差分数据和估计的结构生成图像。

著录项

  • 公开/公告号US2020284735A1

    专利类型

  • 公开/公告日2020-09-10

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;

    申请/专利号US202016879389

  • 发明设计人 ATSUSHI YAMADA;

    申请日2020-05-20

  • 分类号G01N23/04;

  • 国家 US

  • 入库时间 2022-08-21 11:20:28

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