首页>
外国专利>
MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGING
MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGING
展开▼
机译:具有高精度和低灵敏度的MEMS电容式传感器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A MEMS accelerometric sensor includes a bearing structure and a suspended region that is made of semiconductor material, mobile with respect to the bearing structure. At least one modulation electrode is fixed to the bearing structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency. At least one variable capacitor is formed by the suspended region and by the modulation electrode in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal. A sensing assembly generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal indicating the position of the suspended region with respect to the bearing structure and includes a frequency-modulated component that is a function of the acceleration and of the first frequency.
展开▼