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Method for producing electrical wiring member and electrical wiring member
Method for producing electrical wiring member and electrical wiring member
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机译:电气配线构件的制造方法及电气配线构件
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摘要
[Object] To provide a method for producing an electrical wiring member having a layered structure of copper wiring and a blackening layer and to provide the electrical wiring member through a search for a material for the blackening layer, the material being etched at a rate close to that for the copper wiring under conditions where etching controllability is ensured. [Solution] A method for producing an electrical wiring member according to the present invention includes a step of forming, on at least one main surface of a substrate, a layered film 6 of a Cu layer 3 and CuNO-based blackening layers (2a and 2b); a step of forming a resist layer 4a in a predetermined region on the layered film 6; and a step of removing a partial region of the layered film 6 by bringing the layered film 6 into contact with an etchant.
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机译:本发明的目的是提供一种制造具有铜配线和发黑层的层状结构的电配线构件的方法,并且通过寻找用于黑发层的材料的方法,以接近的速率蚀刻该材料,从而提供该电配线构件。在确保蚀刻可控性的条件下,铜配线的电阻与铜配线相同。 [解决方案]本发明的电气配线部件的制造方法包括以下步骤:在基板的至少一个主面上形成Cu层的层状膜 6 B>。 3 B>和基于CuNO的发黑层( 2 B> a I>和 2 B> b I>);在层状膜 6 B>上的预定区域中形成抗蚀剂层 4 B> a I>的步骤;通过使层状膜 6 B>与蚀刻剂接触而去除层状膜 6 B>的部分区域的步骤。
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