Z-axis acceleration sensor with reflection symmetry

摘要

A capacitive micromechanical accelerometer comprising first, second, third and fourth seesaws placed around a center point so that the first and second seesaws cross a first axis and the third and fourth seesaws cross a second axis, orthogonal to the first axis. The first sensing capacitor (+) on the first seesaw exhibits reflection symmetry with the second sensing capacitor (–) on the first seesaw with respect to the first axis, and reflection symmetry with the second sensing capacitor (–) on the second seesaw with respect to the second axis. Furthermore, the first sensing capacitor (+) on the first seesaw also exhibits reflection symmetry with the second sensing capacitor (–) on the third seesaw with respect to a third axis, and reflection symmetry with the second sensing capacitor (–) on the fourth seesaw with respect to a fourth axis, orthogonal to the third axis.