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Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith
Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith
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机译:用于表征中性束并用于过程控制的诊断方法和装置
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摘要
An apparatus and method for characterizing a particle beam provides receiving a particle beam in a central region of a reduced pressure enclosure; impacting the received beam against a beam strike that is thermally isolated from the enclosure; measuring a temperature change of the beam strike due to the impacting beam; measuring a pressure change in the enclosure due to receiving the beam; and processing the measured temperature change and the measured pressure change to determine beam characteristics.
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