METHOD OF SYNTHESIS OF PHOTOCATALYTICALY ACTIVE ZINC OXIDE FILMS DOPED WITH METALIC ZINC PHASE

摘要

The invention relates to a new technological solution on how to apply magnetron sputtering for the synthesis of improved photocatalytic activity zinc oxide films doped with metallic zinc phase. To deposit films with controlled levels of oxygen vacancies, structural defects and metallic zinc phase, including not fully oxidised Zinc species, magnetron sputtering process has to be implemented with Ar-O2 gas mixture control based on the continuous real time plasma spectra emission monitoring and interpretation. The described method of Ar-O2 gas mixture control allows to form photocatalytic films whose activity is 2-3 times higher in comparison to the conventional zinc oxide films.