INSPECTION INSTRUCTION INFORMATION GENERATION DEVICE, SUBSTRATE INSPECTION SYSTEM, INSPECTION INSTRUCTION INFORMATION GENERATION METHOD, AND INSPECTION INSTRUCTION INFORMATION GENERATION PROGRAM

摘要

In the present invention, on the basis of conduction structure information D1 indicating how a planar conductor IP, a plurality of conduction parts P, wiring W, and a via V are conductively connected in a substrate comprising a conductor layer Lc, a substrate surface F upon which the conduction parts P are provided, a wiring layer L, and the via V, if there are a plurality of groups of conduction parts P electrically connected to each other via the wiring W of the wiring layer L, inspection instruction information generation processing is carried out in which conduction parts P are selected from the groups one pair at a time as first selected conduction parts and information indicating a plurality of the pairs of first selected conduction parts that have been selected is generated as inspection instruction information D2.