METHOD AND APPARATUS TO ELIMINATE CONTAMINANTS FROM AN ACCELERATED NEUTRAL ATOM BEAM TO PROTECT A BEAM TARGET

摘要

An improved ANAB system or process substantially or fully eliminating contaminant particles from reaching a beam target by adding to the usual primary (first) ionizer of the ANAB system or process an additional (second) ionizer to ionize contaminant particles and means to block or retard the ionized particles to prevent their reaching the beam target.