Characterization of a material using combined laser-based IR spectroscopy and laser-induced breakdown spectroscopy

摘要

A method and a system for characterizing an elemental composition and a molecular composition of a material are provided. Laser-based IR spectroscopy measurements and LIBS measurements are performed at a same analysis spot on the material. The IR spectroscopy measurement data can be used to characterize the molecular composition of the material, whereas the LIBS data can be used to characterize the elemental composition of the material. 2D and 3D profiles of a sample of the material may be obtained based on this data.