首页> 外国专利> METHOD FOR PROCESSING IMAGES OF SEMICONDUCTOR STRUCTURES, AND FOR PROCESS CHARACTERIZATION AND PROCESS OPTIMIZATION BY MEANS OF SEMANTIC DATA COMPRESSION

METHOD FOR PROCESSING IMAGES OF SEMICONDUCTOR STRUCTURES, AND FOR PROCESS CHARACTERIZATION AND PROCESS OPTIMIZATION BY MEANS OF SEMANTIC DATA COMPRESSION

机译:用于处理半导体结构的图像,以及通过语义数据压缩手段进行过程表征和过程优化的方法

摘要

The invention to methods for processing images of a semiconductor structure of a solar cell generated using imaging methods. Suitable methods comprise processing the image of the semiconductor structure by means of a trained neural network in order to generate a semantic representation of the image, wherein a data variable of the semantic representation is lower than a data variable of the image. Methods further comprise storing the semantic representation assigned to the semiconductor structure, as an information carrier of relevant information of the image for determining a property of the solar cell and/or for a crystal analysis of a semiconductor structure of the solar cell. Further aspects relate to methods for improving a semiconductor process, to methods for evaluating shaded regions in spatially resolved quality images of semiconductor structures, and to methods for predicting at least one property of a solar cell.
机译:本发明涉及用于处理使用成像方法产生的太阳能电池的半导体结构的图像的方法。合适的方法包括借助于训练的神经网络来处理半导体结构的图像,以便生成图像的语义表示,其中,语义表示的数据变量低于图像的数据变量。方法进一步包括存储分配给半导体结构的语义表示,作为用于确定太阳能电池的特性和/或用于太阳能电池的半导体结构的晶体分析的图像的相关信息的信息载体。进一步的方面涉及用于改进半导体工艺的方法,用于评估在空间上解析的半导体结构的质量图像中的阴影区域的方法,以及用于预测太阳能电池的至少一个特性的方法。

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