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METHOD FOR PROCESSING IMAGES OF SEMICONDUCTOR STRUCTURES, AND FOR PROCESS CHARACTERIZATION AND PROCESS OPTIMIZATION BY MEANS OF SEMANTIC DATA COMPRESSION
METHOD FOR PROCESSING IMAGES OF SEMICONDUCTOR STRUCTURES, AND FOR PROCESS CHARACTERIZATION AND PROCESS OPTIMIZATION BY MEANS OF SEMANTIC DATA COMPRESSION
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机译:用于处理半导体结构的图像,以及通过语义数据压缩手段进行过程表征和过程优化的方法
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摘要
The invention to methods for processing images of a semiconductor structure of a solar cell generated using imaging methods. Suitable methods comprise processing the image of the semiconductor structure by means of a trained neural network in order to generate a semantic representation of the image, wherein a data variable of the semantic representation is lower than a data variable of the image. Methods further comprise storing the semantic representation assigned to the semiconductor structure, as an information carrier of relevant information of the image for determining a property of the solar cell and/or for a crystal analysis of a semiconductor structure of the solar cell. Further aspects relate to methods for improving a semiconductor process, to methods for evaluating shaded regions in spatially resolved quality images of semiconductor structures, and to methods for predicting at least one property of a solar cell.
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