METHOD FOR CONTROLLING A DRIVE DEVICE OF A MICRO-OSCILLATION MIRROR, CONTROL APPARATUS AND DEFLECTION MIRROR DEVICE

摘要

The invention relates to a method for controlling a drive device (20) of a micro-oscillation mirror (16), to a control apparatus (28), and to a deflection mirror device (14). The drive device (20) has at least two comb drives (22a, 22b) which are arranged on different radial sides of a pivot axis (18) of the micro-oscillation mirror (16). In the method, at least two activation signals (AS1, AS2) are generated and thus the at least two comb drives (22a, 22b) are activated at least temporarily such that the two comb drives drive the micro-oscillation mirror (16) in an oscillating manner. At least one elongation signal (P1, P2) characterising the elongation (26) of the micro-oscillation mirror (16) is generated with the aid of at least one comb drive (22a, 22b). At least one of the activation signals (AS1, AS2) is adapted to the oscillation of the micro-oscillation mirror (16) on the basis of at least one of the elongation signals (P1, P2). By means of at least one switching device (34), at least one of the comb drives (22a, 22b) is connected alternately to an activation device (32) for receiving at least one activation signal (AS1, AS2) or to an elongation detection device (24) for generating at least one elongation signal (P1, P2).