首页> 外国专利> IN-PLANE MAGNETIZED FILM, IN-PLANE MAGNETIZED FILM MULTILAYER STRUCTURE, HARD BIAS LAYER, MAGNETORESISTIVE ELEMENT, AND SPUTTERING TARGET

IN-PLANE MAGNETIZED FILM, IN-PLANE MAGNETIZED FILM MULTILAYER STRUCTURE, HARD BIAS LAYER, MAGNETORESISTIVE ELEMENT, AND SPUTTERING TARGET

机译:平面磁化膜,平面磁化膜多层结构,硬偏置层,磁阻元件和溅射靶

摘要

Provided is a CoPt-oxide-based in-plane magnetized film which has a magnetic coercive force Hc of 2.00 kOe or more and has remanent magnetization Mrt per unit area of 2.00 memu/cm2 or more. An in-plane magnetized film (10) for use as a hard bias layer (14) in a magnetoresistive element (12), which contains metal Co, metal Pt and an oxide, wherein the metal Co and the metal Pt are contained in amounts of 55 at% or more and less than 95 at% and more than 5 at% and 45 at% or less, respectively, relative to the total amount of the metal components in the in-plane magnetized film (10), the oxide is contained in an amount of 10 to 42 vol% inclusive relative to the whole amount of the in-plane magnetized film (10), and the thickness is 20 to 80 nm inclusive.
机译:提供了一种CoPt氧化物系面内磁化膜,其磁矫顽力Hc为2.00kOe以上,并且每单位面积的剩磁Mrt为2.00memu / cm 2 以上。用作磁阻元件(12)中的硬偏置层(14)的面内磁化膜(10),其包含金属Co,金属Pt和氧化物,其中金属Co和金属Pt的含量为相对于面内磁化膜(10)中的金属成分的总量,分别为55at%以上且小于95at%,大于5at%和45at%以下。相对于面内磁化膜(10)的总量,其含量为10〜42vol%(含),厚度为20〜80nm(含)。

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