首页> 外国专利> METHOD FOR OBTAINING A SOLID MATERIAL WITH GASEOUS AGGREGATES BY MEANS OF MAGNETRON CATHODE SPUTTERING IN STATIC OR QUASISTATIC CONDITIONS TO REDUCE THE USE OF GAS

METHOD FOR OBTAINING A SOLID MATERIAL WITH GASEOUS AGGREGATES BY MEANS OF MAGNETRON CATHODE SPUTTERING IN STATIC OR QUASISTATIC CONDITIONS TO REDUCE THE USE OF GAS

机译:通过在静态或准静态条件下通过磁控溅射法获得含气态骨料的固体材料的方法,以减少气体的使用

摘要

The present invention relates to a method for obtaining a solid material with gaseous aggregates embedded therein, wherein the aggregates are embedded inside nanopores and/or in the grain boundaries of the solid, by means of magnetron cathode sputtering, in a static or quasistatic regime. The invention belongs to processes of the metallurgist industry and/or processes for obtaining materials with others embedded (nanocomposites) by means of sputtering.
机译:本发明涉及一种获得具有嵌入其中的气态聚集体的固体材料的方法,其中所述聚集体通过磁控阴极溅射以静态或准静态方式嵌入纳米孔内部和/或固体的晶界中。本发明属于冶金工业的方法和/或用于通过溅射获得具有其他嵌入的(纳米复合材料)材料的方法。

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