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MACROSCOPIC TEXTURING FOR ANODIZED AND COATED SURFACES
MACROSCOPIC TEXTURING FOR ANODIZED AND COATED SURFACES
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机译:阳极氧化和涂层表面的宏观纹理化
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摘要
A consumable part for a plasma processing chamber includes a plasma facing side. An engineered surface is formed into the plasma facing side of the consumable part. A plurality of raised features defines the engineered surface, wherein features are arranged in a predefined pattern, wherein each of the plurality of raised features includes a top region having an outer edge and a sidewall. A base surface of the engineered surface is configured to surround each of the plurality of raised features, such that a corresponding sidewall of a corresponding raised feature extends up at an angle from the base surface to a corresponding top region. The consumable part is configured to be installed in the plasma processing chamber. The consumable part is configured to be exposed to a plasma and by products of the plasma.
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