JOINT BODY OF TARGET MATERIAL AND BACKING PLATE, AND METHOD FOR MANUFACTURING JOINT BODY OF TARGET MATERIAL AND BACKING PLATE

摘要

This joint body of a target material and a backing plate, has a target material containing Ta and a backing plate joined to the target material, wherein the tensile strength between the target material and the backing plate is 20 kg/mm² or more, and the average hydrogen content of the target material is 7 vol. ppm or less.