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MOS eye transfer type, manufacturing method of MOS eye transfer type and transfer method of MOS eye structure

机译:MOS眼转移类型,MOS眼转移类型的制造方法和MOS眼结构的转移方法

摘要

An object of the present invention is to provide a method for producing a moth-eye transfer type and a moth-eye transfer type with a simple and inexpensive manufacturing process. In order to solve the above problems, the moth-eye transfer type 1 of the present invention includes a base 10, a base layer 20 formed on the base 10, and a glass carbon layer formed on the base layer 20 ( 30), the glass carbon layer 30 has an inverted moth-eye structure RM on the surface 30a, and the inverted moth-eye structure RM is a randomly arranged awl-shaped hole. It is characterized by.
机译:本发明的目的是提供一种以简单且廉价的制造方法制造蛾眼转印型和蛾眼转印型的方法。为了解决上述问题,本发明的蛾眼转印型1包括基体10,形成在基体10上的基体层20,以及形成在基体层20(30)上的玻璃碳层。玻璃碳层30在表面30a上具有倒蛾眼结构RM,倒蛾眼结构RM是无规设置的锥状孔。它的特点是。

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