ELECTROMAGNETIC RADIATION DETECTOR ENCAPSULATED BY TRANSFER OF THIN LAYER AND METHOD OF ENCAPSULATING AT LEAST ONE SENSITIVE ELEMENT OF THE ELECTROMAGNETIC RADIATION DETECTOR

摘要

The present invention relates to an electromagnetic radiation detector, wherein the detector is: At least one membrane 108 suspended on the substrate 101; And A cap (110) for closing the sealing cavity (115) having at least one membrane. According to the invention: The thickness E of the cap 110 is less than or equal to 10 μm; The cap supports at least a support wall (106) surrounding the membrane; The detector has a first metal sealing layer 112A and a second metal sealing layer 112B interposed between the cap and the support wall, with a peripheral bonding region 112C extending therebetween. The invention also relates to a method of making the detector. The present invention provides an encapsulation solution using thin caps where the membrane is not exposed to high temperatures.